Electron beam mask writer EBM-7000 for hp 32nm generation.
| Autor: | Kamikubo, Takashi, Ohtoshi, Kenji, Nakayamada, Noriaki, Nishimura, Rieko, Sunaoshi, Hitoshi, Akeno, Kiminobu, Mitsui, Soichiro, Tachikawa, Yuichi, Inoue, Hideo, Oogi, Susumu, Higurashi, Hitoshi, Mine, Akinori, Ishimura, Takiji, Tsuchiya, Seiichi, Gomi, Yoshitada, Matsui, Hideki, Tamamushi, Shuichi |
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| Zdroj: | Proceedings of SPIE; Nov2009 Part 3, Issue 1, p74881E-74881E-10, 10p |
| Databáze: | Complementary Index |
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