Isotropic treatment of EMF effects in advanced photomasks.
| Autor: | Tirapu Azpiroz, Jaione, Rosenbluth, Alan E., Graur, Ioana, Burr, Geoffrey W., Villares, Gustavo |
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| Zdroj: | Proceedings of SPIE; Nov2009 Part 3, Issue 1, p74882D-74882D-20, 20p |
| Databáze: | Complementary Index |
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