Performance of a programmable illuminator for generation of freeform sources on high NA immersion systems.
| Autor: | Mulder, Melchior, Engelen, André, Noordman, Oscar, Kazinczi, Robert, Streutker, Gert, van Drieenhuizen, Bert, Hsu, Stephen, Gronlund, Keith, Degünther, Markus, Jürgens, Dirk, Eisenmenger, Johannes, Patra, Michael, Major, Andras |
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| Zdroj: | Proceedings of SPIE; Nov2009 Part 3, Issue 1, p75200Y-75200Y-9, 9p |
| Databáze: | Complementary Index |
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