Control of CD errors and hotspots by using a design based verification system.
| Autor: | Choi, Bong-Seok, Lee, Sang-Ho, Kang, Young-Seog, Han, Woo-Sung |
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| Zdroj: | Proceedings of SPIE; Nov2009 Part 3, Issue 1, p75201X-75201X-7, 7p |
| Databáze: | Complementary Index |
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