Bottom-anti-reflective coatings (BARC) for LFLE double patterning process.
| Autor: | Sakamoto, Rikimaru, Endo, Takafumi, Ho, Bang-Ching, Kimura, Shigeo, Ishida, Tomohisa, Kato, Masakazu, Fujitani, Noriaki, Onishi, Ryuji, Hiroi, Yoshiomi, Maruyama, Daisuke |
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| Zdroj: | Proceedings of SPIE; Nov2009 Part 3, Issue 1, p75201Y-75201Y-10, 10p |
| Databáze: | Complementary Index |
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