Automated measurement of centering errors and relative surface distances for the optimized assembly of micro-optics.
| Autor: | Langehanenberg, Patrik, Dumitrescu, Eugen, Heinisch, Josef, Krey, Stefan, Ruprecht, Aiko K. |
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| Zdroj: | Proceedings of SPIE; Nov2011, Issue 1, p79260E-79260E-8, 8p |
| Databáze: | Complementary Index |
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