Static EUV micro-exposures using the ETS Set-2 optics.
Autor: | Naulleau, Patrick P., Goldberg, Kenneth A., Anderson, Erik H., Bokor, Jeffrey, Harteneck, Bruce D., Jackson, Keith H., Olynick, Deirdre L., Salmassi, Farhad, Baker, Sherry L., Mirkarimi, Paul B., Spiller, Eberhard A., Walton, Christopher C., O'Connell, Donna J., Yan, Pei-Yang, Zhang, Guojing |
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Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p36-46, 11p |
Databáze: | Complementary Index |
Externí odkaz: |