Development of a 10-kHz capillary discharge EUV lamp.
| Autor: | Sarroukh, Ouassima, Robert, Eric, Gonthiez, Thierry, Viladrosa, Raymond, Idrissi, Moulay M., Fleurier, Claude, Pouvesle, Jean-Michel, Cachoncille, Christophe |
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| Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p634-640, 7p |
| Databáze: | Complementary Index |
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