Three-dimensional measurement by tilting and moving objective lens in CD-SEM.
| Autor: | Kimura, Kouji, Abe, Kazuo, Tsuruga, Yasuko, Suzuki, Hitoshi, Kochi, Nobuo, Koike, Hirotami, Yamazaki, Yuuichiro |
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| Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p1089-1094, 6p |
| Databáze: | Complementary Index |
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