New laboratory EUV reflectometer for large optics using a laser plasma source.
| Autor: | van Loyen, Ludwig, Boettger, Thomas, Braun, Stefan, Mai, Hermann, Leson, Andreas, Scholze, Frank, Tuemmler, Johannes, Ulm, Gerhard, Legall, Herbert, Nickles, Peter V., Sandner, Wolfgang, Stiel, Holger, Rempel, Christian E., Schulze, Mirko, Brutscher, Joerg, Macco, Fritz, Muellender, Stefan |
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| Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p12-21, 10p |
| Databáze: | Complementary Index |
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