New apparent beam width artifact and measurement methodology for CD-SEM resolution monitoring.
Autor: | Mayer, Jason A., Huizenga, Kylee J., Solecky, Eric P., Archie, Charles N., Banke Jr., G. W., Cogley, Robert M., Nathan, Claudine, Robert, James M. |
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Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p699-710, 12p |
Databáze: | Complementary Index |
Externí odkaz: |