New apparent beam width artifact and measurement methodology for CD-SEM resolution monitoring.

Autor: Mayer, Jason A., Huizenga, Kylee J., Solecky, Eric P., Archie, Charles N., Banke Jr., G. W., Cogley, Robert M., Nathan, Claudine, Robert, James M.
Zdroj: Proceedings of SPIE; Nov2003, Issue 1, p699-710, 12p
Databáze: Complementary Index