NIST-traceable calibration of CD-SEM magnification using a 100-nm pitch standard.
| Autor: | Tortonese, Marco, Guan, Yu, Prochazka, Jerry |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p711-718, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Tortonese, Marco, Guan, Yu, Prochazka, Jerry |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p711-718, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|