Zero-shrink dimension evaluated for ArF-resist patterns measured by CD-SEM.
| Autor: | Kawada, Hiroki, Iizumi, Takashi, Otaka, Tadashi |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p861-865, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Kawada, Hiroki, Iizumi, Takashi, Otaka, Tadashi |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p861-865, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|