Fabrication of integrated circuits with high yield using ultra-thin resist processes.
| Autor: | Peters, Richard D., Postnikov, Sergei V., Cobb, Jonathan L., Dakshina-Murthy, S., Stephens, Tab, Parker, Colita, Luckowski, Eric, Martinez Jr., Arturo M., Wu, Wei, Hector, Scott D. |
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| Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p1390-1401, 12p |
| Databáze: | Complementary Index |
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