Quantum efficiency of PAG decomposition in different polymer matrices at advanced lithographic wavelengths.
| Autor: | Fedynyshyn, Theodore H., Sinta, Roger F., Mowers, William A., Cabral, Alberto |
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| Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p310-321, 12p |
| Databáze: | Complementary Index |
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