Investigation of the polymer systems for ArF resists.
| Autor: | Yamana, Mitsuharu, Hirano, Masumi, Nagahara, Seiji, Kasama, Kunihiko, Hada, Hideo, Miyairi, Miwa, Kohno, Shinichi, Iwai, Takeshi |
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| Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p752-760, 9p |
| Databáze: | Complementary Index |
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