PEB sensitivity studies of ArF resist.
| Autor: | Lee, SangHo, Kim, Woo-Kyu, Rahman, Dalil, Kudo, Takanori, Timko, Allen, Anyadiegwu, Clement, McKenzie, Douglas S., Kanda, Takashi, Dammel, Ralph R., Padmanaban, Munirathna |
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| Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p798-806, 9p |
| Databáze: | Complementary Index |
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