Spin-on bottom antireflective coating defect reduction by proper filter selection and process optimization.
| Autor: | Brakensiek, Nickolas L., Kidd, Brian, Mesawich, Michael, Stevens Jr., Don, Gotlinsky, Barry |
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| Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p858-865, 8p |
| Databáze: | Complementary Index |
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