Preliminary microfluidic simulations for immersion lithography.
| Autor: | Wei, Alexander C., Nellis, Greg F., Abdo, Amr Y., Engelstad, Roxann L., Chen, Cheng-Fu, Switkes, Michael, Rothschild, Mordechai |
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| Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p713-723, 11p |
| Databáze: | Complementary Index |
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