COPs/particles discrimination using an automated surface inspection tool.
| Autor: | Lorenzi, Gabriele, Nguyen, Kim Hung, Sanna, Cristina, Orizio, Roberta, Borionetti, Gabriella |
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| Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p39-49, 11p |
| Databáze: | Complementary Index |
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