Spectroscopic ellipsometric scatterometry: sources of errors in critical dimension control.
| Autor: | Hazart, Jerome, Grand, Gilles, Thony, Philippe, Herisson, David, Garcia, Stephanie, Lartigue, Oliver |
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| Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p9-20, 12p |
| Databáze: | Complementary Index |
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