Investigation of product design weaknesses using model-based OPC sensitivity analysis.
| Autor: | Postnikov, Sergei V., Lucas, Kevin, Garza, Cesar M., Wimmer, Karl, LaCour, Patrick, Word, James C. |
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| Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p160-171, 12p |
| Databáze: | Complementary Index |
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