Optimized cobalt silicide formation through etch process improvements.
| Autor: | Tucker, David S., Yang, Richard, Maines, Heather |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p334-340, 7p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|
| Autor: | Tucker, David S., Yang, Richard, Maines, Heather |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p334-340, 7p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|