Fabrication of 3D high-aspect-ratio microfluidic components using laser machining and LIGA.

Autor: Ghantasala, Muralidhar K., Barber, Richard C., Moldovan, Nicolai A., Mancini, Derrick C., Harvey, Erol C.
Zdroj: Proceedings of SPIE; Nov2003, Issue 1, p342-346, 5p
Databáze: Complementary Index