Fabrication of 3D high-aspect-ratio microfluidic components using laser machining and LIGA.
Autor: | Ghantasala, Muralidhar K., Barber, Richard C., Moldovan, Nicolai A., Mancini, Derrick C., Harvey, Erol C. |
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Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p342-346, 5p |
Databáze: | Complementary Index |
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