Computer simulation of the creation of 31P-doped layer in 28Si/30Si/28Si heterostructure by neutron transmutation doping.
| Autor: | Trushin, Yuri V., Mikhailov, Gennadi V., Zhurkin, Evgeni E., Kharlamov, Vladimir S., Schmidt, Alexander A., Krusenstern, Fedor A. |
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| Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p124-127, 4p |
| Databáze: | Complementary Index |
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