Comparative linewidth measurements on chrome and MoSi structures using newly developed microscopy methods.
| Autor: | Bodermann, Bernd, Mirande, Werner, Kerwien, Norbert, Tavrov, Alexander, Totzeck, Michael, Tiziani, Hans |
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| Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p320-330, 11p |
| Databáze: | Complementary Index |
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