Miniature interferometers for applications in microtechnology and nanotechnology.
| Autor: | Jager, Gerd, Manske, Eberhard, Hausotte, Tino, Fuαl, Roland, Grunwald, Rainer, Buchner, Hans, Schott, Walter, Dontsov, Denys |
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| Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p185-192, 8p |
| Databáze: | Complementary Index |
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