Experimental investigation of hard pellicle purge processes.
| Autor: | Abdo, Amr Y., Nellis, Gregory F., Diab, Aya K., Cotte, Eric P., Chalekian, Aaron J., Engelstad, Roxann L., Lovell, Edward G., Peski, Chris V. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2003, Issue 1, p897-904, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|