Integration of silicon bench micro-optics.
| Autor: | Han, Hongtao, Stack, Jared D., Mathews, Jay, Koehler, Charles S., Johnson, Eric G., Kathman, Alan D. |
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| Zdroj: | Proceedings of SPIE; Nov1999, Issue 1, p234-243, 10p |
| Databáze: | Complementary Index |
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