Investigation of lithography performance using multipass gray (MPG) with MEBES 5000.
| Autor: | Dean, Robert L., Alexander, David W., Chabala, Jan M., Coleman, Thomas P., Hartglass, Caryn, Lu, Maiying, Sauer, Charles A., Weaver, Suzanne |
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| Zdroj: | Proceedings of SPIE; Nov1999, Issue 1, p166-178, 13p |
| Databáze: | Complementary Index |
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