Electron optical analysis of SCALPEL writing strategy.
Autor: | Zhu, Xieqing, Munro, Eric, Liu, Haoning, Rouse, John A., Waskiewicz, Warren K. |
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Zdroj: | Proceedings of SPIE; Nov1999, Issue 1, p207-216, 10p |
Databáze: | Complementary Index |
Externí odkaz: |