Development of a 0.1 m linewidth fabrication process for x-ray lithography with a laser plasma source.
| Autor: | Bobkowski, Romuald, Fedosejevs, Robert, Broughton, James N. |
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| Zdroj: | Proceedings of SPIE; Nov1999, Issue 1, p392-399, 8p |
| Databáze: | Complementary Index |
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