Scale-up of a cluster jet laser plasma source for extreme ultraviolet lithography.
| Autor: | Kubiak, Glenn D., Bernardez II, Luis J., Krenz, Kevin D., Sweatt, William C. |
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| Zdroj: | Proceedings of SPIE; Nov1999, Issue 1, p669-678, 10p |
| Databáze: | Complementary Index |
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