Quantitative line edge roughness characterization for sub-0.25-m DUV lithography.
| Autor: | Kant, Avinash, Talor, George, Samarakone, Nandasiri |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1999, Issue 1, p35-42, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Kant, Avinash, Talor, George, Samarakone, Nandasiri |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1999, Issue 1, p35-42, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|