Cycloolefin/maleic anhydride copolymers for 193-nm resist compositions.
| Autor: | Rahman, M. D., Dammel, Ralph R., Cook, Michelle M., Ficner, Stanley A., Padmanaban, Munirathna, Oberlander, Joseph E., Durham, Dana L., Klauck-Jacobs, Axel |
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| Zdroj: | Proceedings of SPIE; Nov1999, Issue 1, p1193-1200, 8p |
| Databáze: | Complementary Index |
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