Thermal phenomena in acrylic 193-nm resists.
| Autor: | Paniez, Patrick J., Gally, Severine, Mortini, Benedicte P., Rosilio, Charles, Sassoulas, Pierre-Olivier, Dammel, Ralph R., Padmanaban, Munirathna, Klauck-Jacobs, Axel, Oberlander, Joseph E. |
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| Zdroj: | Proceedings of SPIE; Nov1999, Issue 1, p1352-1363, 12p |
| Databáze: | Complementary Index |
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