Mechanism of the Trefonas effect (polyphotolysis) in dissolution inhibition resists.
| Autor: | Han, Yu-Kai, Reiser, Arnost |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1999, Issue 1, p360-367, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Han, Yu-Kai, Reiser, Arnost |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1999, Issue 1, p360-367, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|