New polymers for 193-nm single-layer resists based on substituted cycloolefins/maleic anhydride resins.
| Autor: | Rushkin, Ilya L., Houlihan, Francis M., Kometani, Janet M., Hutton, Richard S., Timko, Allen G., Reichmanis, Elsa, Nalamasu, Omkaram, Gabor, Allen H., Medina, Arturo N., Slater, Sydney G., Neisser, Mark O. |
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| Zdroj: | Proceedings of SPIE; Nov1999, Issue 1, p44-50, 7p |
| Databáze: | Complementary Index |
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