Design of a new bottom antireflective coating composition for KrF resist.
| Autor: | Mizutani, Kazuyoshi, Momota, Makoto, Aoai, Toshiaki, Yagihara, Morio |
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| Zdroj: | Proceedings of SPIE; Nov1999, Issue 1, p518-526, 9p |
| Databáze: | Complementary Index |
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