Recent progress in 193-nm antireflective coatings.
| Autor: | Meador, James D., Guerrero, Douglas J., Xu, Gu, Shao, Xie, Dobson, Norman, Claypool, James B., Nowak, Kelly A. |
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| Zdroj: | Proceedings of SPIE; Nov1999, Issue 1, p800-809, 10p |
| Databáze: | Complementary Index |
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