Comparative study of the roughness of optical surfaces and thin films using atomic force microscopy, x-ray scattering, and light scattering methods.

Autor: Kozhevnikov, Igor V., Asadchikov, Victor E., Duparre, Angela, Gilev, Oleg N., Havronin, Nikolai A., Krivonosov, Yury S., Ostashev, Vladimir I., Steinert, Joerg
Zdroj: Proceedings of SPIE; Nov1999, Issue 1, p348-354, 7p
Databáze: Complementary Index