Two-wave x-ray methods for characterization of supersmooth substrates and thin films.
| Autor: | Vinogradov, Alexander V., Pirshin, Igor V., Touryanski, Alexander G., Fechtchenko, Rouslan M. |
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| Zdroj: | Proceedings of SPIE; Nov1999, Issue 1, p167-178, 12p |
| Databáze: | Complementary Index |
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