Microlens arrays based on chalcogenide glass resists using the proximity microlithography method.
| Autor: | Noach, Salman, Manevich, M., Klebanov, Matvei, Lyubin, Victor, Eisenberg, Naftali P. |
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| Zdroj: | Proceedings of SPIE; Nov1999, Issue 1, p158-162, 5p |
| Databáze: | Complementary Index |
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