Grating pitch measurements with the molecular measuring machine.
| Autor: | Kramar, John, Jun, Jau-Shi J., Penzes, William B., Scire, Fredric, Teague, E. Clayton, Villarrubia, John S. |
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| Zdroj: | Proceedings of SPIE; Nov1999, Issue 1, p46-53, 8p |
| Databáze: | Complementary Index |
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