Modeling of optical constants of materials comprising photolithographic masks in the VUV.
| Autor: | Harrison, Dale A., Lam, John C., Li, George G., Forouhi, A. Rahim, Dao, Giang T. |
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| Zdroj: | Proceedings of SPIE; Nov1999, Issue 1, p844-852, 9p |
| Databáze: | Complementary Index |
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