W-coating for MEMS.
| Autor: | Mani, Sita S., Fleming, James G., Sniegowski, Jeffry J. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1999, Issue 1, p150-157, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Mani, Sita S., Fleming, James G., Sniegowski, Jeffry J. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1999, Issue 1, p150-157, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|