New sensor for real-time trench depth monitoring in micromachining applications.
| Autor: | Amary, Pascal, Benferhat, Ramdane, Liddane, Kevin J., Ostrovsky, Alain |
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| Zdroj: | Proceedings of SPIE; Nov1999, Issue 1, p205-217, 13p |
| Databáze: | Complementary Index |
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