Acceleration sensitivity of micromachined pressure sensors.
Autor: | August, Richard, Maudie, Theresa, Miller, Todd F., Thompson, Erik |
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Zdroj: | Proceedings of SPIE; Nov1999, Issue 1, p46-53, 8p |
Databáze: | Complementary Index |
Externí odkaz: |
Autor: | August, Richard, Maudie, Theresa, Miller, Todd F., Thompson, Erik |
---|---|
Zdroj: | Proceedings of SPIE; Nov1999, Issue 1, p46-53, 8p |
Databáze: | Complementary Index |
Externí odkaz: |