Improved p-ch MOS transistor performance with an arsenic supersteep retrograde channel profile.
| Autor: | Buller, James F., Cheek, Jon, Wristers, Dirk, Kadoch, Daniel, Duane, Michael |
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| Zdroj: | Proceedings of SPIE; Nov1999, Issue 1, p138-144, 7p |
| Databáze: | Complementary Index |
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