Influence of IMP copper flash layer on the properties of copper films deposited by metal organic chemical vapor deposition.

Autor:	Li, Chao Yong, Zhang, Dao Hua, Qian, Yin, Narayanan, Babu, Wu, Jun J., Yu, Bo, Jiang, Z. X., Foo, Pang Dow, Xie, Joseph, Zhang, Qinyuan, Yoon, Soon Fatt
Zdroj:	Proceedings of SPIE; Nov1999, Issue 1, p46-49, 4p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu